Thermal Stability, Structure and Mechanical Properties of TiSiN Coatings Prepared by Reactive DC Magnetron Co-Sputtering

Scholz, T.; Espinoza-Beltrán, F.J.; Morales-Hernández, J.; Schneider, Gerold A.; García-González, L.; Muñoz-Saldaña, J.

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Home > Materials Science Forum > Advanced Structural Materials II > Thermal Stability, Structure and Mechanical...

Paper Title:

Thermal Stability, Structure and Mechanical Properties of TiSiN Coatings Prepared by Reactive DC Magnetron Co-Sputtering

Periodical	Materials Science Forum (Volume 509)
Main Theme	Advanced Structural Materials II
Edited by	H. Balmori-Ramírez, M. Brito, J.G. Cabañas-Moreno, H.A. Calderón-Benavides, K. Ishizaki and A. Salinas-Rodríguez
Pages	93-98
DOI	10.4028/www.scientific.net/MSF.509.93
Citation	L. García-González et al., 2006, Materials Science Forum, 509, 93
Online since	March, 2006
Authors	L. García-González, J. Morales-Hernández, F.J. Espinoza-Beltrán, J. Muñoz-Saldaña, T. Scholz, Gerold A. Schneider
Keywords	Crystallite Size, Hard Coating, Nanoindentation, Raman Scattering, Texture, Ti-Si-N
Price	US$ 28,-

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Abstract

TiSiN coatings have been prepared by reactive DC magnetron co-sputtering on Corning glass and carbon steel substrates, using Ti-Si targets, with a constant Si:Ti area ratio of 0.2. The flow rate of nitrogen has been varied from 1.6 to 7.0 sccm, for a fixed argon flow rate of 25.0 sccm. We present a study of structure (texture, crystallite size and microstrain), chemical composition, and mechanical properties of the coatings and their dependence on the argon/nitrogen ratio. Moreover, a study of the thermal stability of the coatings has been performed by means of thermal annealing under oxidizing conditions (air atmosphere) at 500 and 600 °C. Coatings with the smallest crystallite size (∼2 nm) present the highest hardness (26 GPa) and the best thermal stability.