Paper Title:
Characterization of a Piezoresistive Microcantilever as a Sensor for Detecting the Bio-Molecules
  Abstract

We propose an electrical detection method for detecting the various bio-molecules effectively with microcantilevers. The piezoresistive microcantilevers were fabricated employing surface micromachining technique that has attractive advantages in terms of cost efficiency, simplicity, and ability of fabricating in array. The fluid cell system for injection of bio-molecular solution is fabricated using polydimethylsiloxane (PDMS) and a fused silica glass. The microcantilever is deflected with respect to the difference of the surface stress caused by the formation of self-assembled bio-molecules on the gold coated side of the microcantilever. We confirmed that the deflections occurred by the bio-molecule adsorption and microcantilever can be widely used to a &-TAS and a lab-on-a-chip as a sensor for the potential detection of various biomolecules.

  Info
Periodical
Materials Science Forum (Volumes 510-511)
Edited by
Hyung Sun Kim, Yu Bao Li and Soo Wohn Lee
Pages
1090-1093
DOI
10.4028/www.scientific.net/MSF.510-511.1090
Citation
K.-A. Yoo, K. H. Na, S.-R. Joung, D. Jeon, Y.J. Choi, Y. S. Kim, C.J. Kang, "Characterization of a Piezoresistive Microcantilever as a Sensor for Detecting the Bio-Molecules", Materials Science Forum, Vols. 510-511, pp. 1090-1093, 2006
Online since
March 2006
Export
Price
$35.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Li Wen Chen, Chia Yen Lee, Chien Hsiung Tsai, Yung Chuan Chen
Abstract:This paper studies the residual stress distributions and tip deflections of microfabricated bilayer cantilevers of varying beam thickness and...
559
Authors: Tae Song Kim
Abstract:The microcantilevers have emerged as a versatile biosensor, and showed excellent performance such as high sensitivity, high selectivity, and...
337
Authors: Xiao Hu Zheng, Yuan Wei Liu, F. Gu, J.K. Kim, Dong Weon Lee
Abstract:A micro grooved finger has smaller bending stiffness and can be used to improve the performance of some micro cantilever devices. The...
1
Authors: Md. Saiful Islam, Abbas Kouzani, Xiu Juan Dai, Wojtek P. Michalski
Abstract:This paper investigates the bending deformation of a cantilever biosensor based on a single-walled carbon nanotube (CNT) and single-walled...
650
Authors: Takahiro Kawashima, Atsushi Matsui, Kazuo Muto, Moeto Nagai, Takayuki Shibata
Chapter 5: MEMS/NEMS
Abstract:In order to detect acoustic emission (AE) signals which are transient elastic waves generated by rapid release of strain energy derived from...
575