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Insights on Amorphous Silicon Nip and MIS 3D Position Sensitive Detectors

Journal Materials Science Forum (Volumes 514 - 516)
Volume Advanced Materials Forum III
Edited by Paula Maria Vilarinho
Pages 13-17
DOI 10.4028/www.scientific.net/MSF.514-516.13
Citation Rodrigo Martins et al., 2006, Materials Science Forum, 514-516, 13
Online since May, 2006
Authors Rodrigo Martins, Daniel Costa, Hugo Águas, Fernanda Soares, António Marques, Isabel Ferreira, P.M.R. Borges, Sergio Pereira, Leandro Raniero, Elvira Fortunato
Keywords Amorphous Silicon, Electronic Devices, Optical Sensors, Position Sensitive Detector (PSD)
Abstract

This work aims to report results of the spatial and frequency optical detection limits of integrated arrays of 32 one-dimensional amorphous silicon thin film position sensitive detectors with nip or MIS structure, under continuous and pulsed laser operation conditions. The arrays occupy a total active area of 45 mm2 and have a plane image resolution better than 15 m with a cut-off frequency of about 6.8 kHz. The non-linearity of the array components varies with the frequency, being about 1.6% for 200 Hz and about 4% for the cut-off frequency (6.8 kHz).

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