Paper Title:
In Situ Observation of Ni-Ti Thin Film Growth by Synchrotron Radiation Scattering
  Abstract

A sputter deposition chamber inserted into the six-circle Huber diffractometer of the materials research station of the ROssendorf BeamLine (ROBL-CRG) at ESRF allowed to perform in-situ experiments during film growth of Ni-Ti. It is equipped with Kapton windows for X-Ray Diffraction (XRD) and specular Reflectivity (XRR) measurements. By following in situ the evolution of the structure of the growing film, we reveal intermediate “states” which cannot be seen/revealed ex situ, because those states occurred only during the growth but were no longer visible after deposition. Vertical Bragg-Brentano large-angle scattering geometry was employed to study the different trends of structural transformations taking place during deposition. Ni-Ti films exhibiting a non-uniform phase content across the film thickness could be produced by varying the power of co-sputtering Ni-Ti plus Ti. A significant decrease of IB2{110}/IB2{200} was observed when a bias of -45 V was applied.

  Info
Periodical
Materials Science Forum (Volumes 514-516)
Edited by
Paula Maria Vilarinho
Pages
1588-1592
DOI
10.4028/www.scientific.net/MSF.514-516.1588
Citation
R. M. S. Martins, F. M. Braz Fernandes, R. J. C. Silva, M. Beckers, N. Schell, "In Situ Observation of Ni-Ti Thin Film Growth by Synchrotron Radiation Scattering", Materials Science Forum, Vols. 514-516, pp. 1588-1592, 2006
Online since
May 2006
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