Paper Title:
Role of Hydrogen Plasma on the Electrical and Optical Properties of Indium Zinc Transparent Conductive Oxide
  Abstract

In this work we studied the influence of the power density of hydrogen plasma on electrical and optical properties (Hall mobility, free carrier concentration, sheet resistance, optical transmittance and a.c. impedance) of indium zinc oxide films, aiming to determine their chemical stability. This is an important factor for the optimization of amorphous/nanocrystalline p-i-n hydrogenated silicon (a/nc-Si:H) solar cells, since they should remain chemically highly stable during the p layer deposition. To perform this work the transparent conductive oxide was exposed to hydrogen plasma at substrate temperature of 473 K, 87 Pa of pressure and 20 sccm of hydrogen flow. The results achieved show that IZO films were reduced for all plasma conditions used, which leads mainly to a decrease on films transmittance. For the lowest power density used in the first minute of plasma exposition the transmittance of the IZO films decreases about 29%.

  Info
Periodical
Materials Science Forum (Volumes 514-516)
Edited by
Paula Maria Vilarinho
Pages
63-67
DOI
10.4028/www.scientific.net/MSF.514-516.63
Citation
L. Raniero, A. Gonçalves, A. Pimentel, S. Zhang, I. Ferreira, P. M. Vilarinho, E. Fortunato, R. Martins, "Role of Hydrogen Plasma on the Electrical and Optical Properties of Indium Zinc Transparent Conductive Oxide", Materials Science Forum, Vols. 514-516, pp. 63-67, 2006
Online since
May 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Lei Zhang, Shi Hua Tang, Hong Liang Pan
Abstract:Hydrogen-induced corrosion is a common damage in petrochemical industry. It can rise crack and bubbling on the surface of metal materials...
2549
Authors: Gabriel Plascencia, David Jaramillo, Felipe Hernández, Jorge Luis González
Abstract:Hydrogen embrittlement is a common problem for the integrity of oil conducting pipes. In this work, we estimate the rate of hydrogen...
500
Authors: H.Y. Seba, R. Cherfi, Farida Hamadache, M. Aoucher
Abstract:This communication reports on the effect of thermal annealing on the physicochemical and electrical properties of boron doped amorphous...
129
Authors: Wen Wu Zhong, Fa Min Liu, Qin Yi Shi, Wei Ping Chen
Chapter 1: Advanced Materials Science
Abstract:Al and Sb codoped ZnO thin films were prepared through a sol-gel spin coating method on glass substrates and annealed in different...
42
Authors: Camila dos Santos Torres, Tiago Falcade, Célia de Fraga Malfatti
Chapter 2: Ceramics I
Abstract:The use of hydrogen fuel cell for generating electricity is one of the potential solutions to solve the energy crisis problem. Electrolysis...
581