Paper Title:
On the Structural Evaluation of Unbiased W-O-N Sputtered Coatings
  Abstract

Tungsten oxynitride films (WOxNy) were deposited with a chemical composition in the range of 0 < x < 1 and 0 < y < 1. For the W-N system, the α-W, β-W, and β-W2N phases were identified according to the amount of nitrogen. In the W-O-N system the structure depended on the amount of oxygen. For an oxygen fraction, fO2 = CO/(CO+CN), smaller than 0.46 the β-W2N phase is evident, whereas above that value the structure became amorphous.

  Info
Periodical
Materials Science Forum (Volumes 514-516)
Edited by
Paula Maria Vilarinho
Pages
825-832
DOI
10.4028/www.scientific.net/MSF.514-516.825
Citation
N. M.G. Parreira, N. J.M. Carvalho, A. Cavaleiro, "On the Structural Evaluation of Unbiased W-O-N Sputtered Coatings", Materials Science Forum, Vols. 514-516, pp. 825-832, 2006
Online since
May 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Li Gou, Ji Lei Zhu, Jun Guo Ran, Suang Feng Yan
Abstract:In order to improve the adhesion between diamond coatings and cemented tungsten carbide (WC-Co) substrates, the diamond coatings were...
1889
Authors: Fu Liu, Ying Song, Fu Ping Wang, Kaoru Igarashi, Tadao Shimizu
Abstract:Hydroxyapatite (HA) coatings were deposited on titanium substrate by means of pulsed laser deposition (PLD) with Nd:YAG laser. Deposition...
1670
Authors: Ming Zhu, Mei Shuan Li
Abstract:Cr-Al-N coatings were deposited on the surface of the (111) single silicon for the aim to study the thermal stability of this kind of...
249
Authors: Jin Xue Zhang
Chapter 2: Engineering Ceramics and Ceramic Composites
Abstract:Compound ceramic coatings with the main crystal phase of Al2TiO5 (as-coated samples) were prepared in situ on the surface of Ti-6Al-4V alloy...
1066
Authors: Lin Yung Tseng, Jhewn Kuang Chen, Kai Hung Hsu, Wan Yu Wu, Chi Lung Chang
Chapter 2: Material Processing Technology, Technologies of Application of Materials
Abstract:Nanocomposite Cr-W-B-N coatings with various tungsten contents were synthesized on silicon wafer substrates. The used technique is a DC...
430