Structural Study of In2O3 Structures Grown by the Metalorganic Chemical Vapor Deposition |
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| Journal | Materials Science Forum (Volume 517) |
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| Volume | Functional Materials and Devices |
| Edited by | A.K. Arof and S.A. Hashim Ali |
| Pages | 77-80 |
| DOI | 10.4028/www.scientific.net/MSF.517.77 |
| Citation | Hyoun Woo Kim et al., 2006, Materials Science Forum, 517, 77 |
| Online since | June, 2006 |
| Authors | Hyoun Woo Kim, Ju Hyun Myung, Chong Mu Lee |
| Keywords | Indium Oxide, MOCVD, Nano Structure |
| Abstract | We have synthesized the film-like and rod-like structures of indium oxide (In2O3) by metalorganic chemical vapor deposition (MOCVD) method. The structural morphology of the deposits changed from the film to the arrays of 1-dimensional (1-D) materials with increasing the deposition temperature. The 1-D materials with the serrated surfaces prepared at 350ºC possessed a crystalline cubic structure and had preferentially grown along the [111] direction. |
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