Paper Title:
Structural Study of In2O3 Structures Grown by the Metalorganic Chemical Vapor Deposition
  Abstract

We have synthesized the film-like and rod-like structures of indium oxide (In2O3) by metalorganic chemical vapor deposition (MOCVD) method. The structural morphology of the deposits changed from the film to the arrays of 1-dimensional (1-D) materials with increasing the deposition temperature. The 1-D materials with the serrated surfaces prepared at 350°C possessed a crystalline cubic structure and had preferentially grown along the [111] direction.

  Info
Periodical
Edited by
A.K. Arof and S.A. Hashim Ali
Pages
77-80
DOI
10.4028/www.scientific.net/MSF.517.77
Citation
H. W. Kim, J. H. Myung, C. M. Lee, "Structural Study of In2O3 Structures Grown by the Metalorganic Chemical Vapor Deposition ", Materials Science Forum, Vol. 517, pp. 77-80, 2006
Online since
June 2006
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