Paper Title:
Analysis of SiO2 Thin Film Deposited by Reactive Sputtering
  Abstract

SiO2 layers were deposited by reactive d.c ion sputtering (using 1keV Ar+ ion gun) from a high purity silicon target in an oxygen ambient. The base pressure in the deposition chamber was 4.7·10-9mbar, and the substrate temperature was held at 550 °C. The argon partial pressure during ion gun operation was 1·10-3mbar. Structural characterization of the films was performed by Rutherford backscattering spectrometry (RBS analysis), electron microprobe analysis, X-ray diffraction (XRD analysis) and Raman spectroscopy. Reactive sputtering proved to be efficient for the deposition of silica at an oxygen partial pressure of 2·10-4mbar and an electrical current on the target of 5.5mA.

  Info
Periodical
Edited by
Dragan P. Uskokovic, Slobodan K. Milonjic and Dejan I. Rakovic
Pages
149-154
DOI
10.4028/www.scientific.net/MSF.518.149
Citation
I. Radović, Y. Serruys, Y. Limoge, O. Jaoul, N.Ž. Romčević, S. Poissonnet, N. Bibić, "Analysis of SiO2 Thin Film Deposited by Reactive Sputtering", Materials Science Forum, Vol. 518, pp. 149-154, 2006
Online since
July 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Hyun Jung Kim, In Chang Song, Jae Ho Sim, Hyo Jin Kim, Do Jin Kim, Young Eon Ihm, Woong Kil Choo
Abstract:We report on the effect of the oxygen partial pressure ratio in the sputtering gas mixture on the electrical and magnetic properties of cubic...
509
Authors: L.V. Tho, K.E. Lee, Cheol Gi Kim, Chong Oh Kim, W.S. Cho
Abstract:Alloys of CoFe-rich magnetic films are well known as typical soft magnetic alloys. They are used for many kinds of electric and electronic...
1367
Authors: Wen Cheng Tzou, Kai Huang Chen, Cheng Fu Yang, Ying Chung Chen
Abstract:In this study, ferroelectric thin films of SrBi2Ta2O9 (SBT) or bilayered SrBi2Ta2O9/ Ba(Zr0.1Ti0.9)O3 (SBT/BZT) are successfully deposited on...
304
Authors: Jian Ting He, Bo Xue Tan, Yuan Bin Su, Shu Lian Yang, Qin Qin Wei
Chapter 24: Laser Based Manufacturing
Abstract:Highly c-axis oriented ZnO thin films were deposited on n-Si (111) substrate at various oxygen partial pressures by pulsed laser deposition...
6293
Authors: Hui Li, Hai Tao Feng, Fang Hui Zhang, Yun Liu, Er Qing Xie
Chapter 13: Optical/Electronic/Magnetic, New Functional and Energy Materials
Abstract:Indium doped zinc oxide (ZnO:In) films were prepared in oxygen-rich condition by direct current(DC) reactive magnetron sputtering. The X-ray...
2512