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Properties and Characterization of Amorphous Carbon Films

Materials Science Forum Volumes 52 - 53

• Papers
• Abstracts

• p1 Ion Beam and Ion-Assisted Deposition of Diamond-Like Carbon Films   [ 1 M ]
  Authors: S. Aisenberg, F.M. Kimock
• p41 Plasma Deposition, Properties and Structure of Amorphous Hydrogenated Carbon Films   [ 1 M ]
  Authors: P. Koidl, Ch. Wild, B. Dischler, J. Wagner, M. Ramsteiner
• p71 Structure and Physical Properties of Amorphous Hydrogenated Carbon (a-C:H) Films   [ 1 M ]
  Authors: H. Tsai
• p103 The Microstructure of Carbon Thin Films   [ 867 K ]
  Authors: D.C. Green, D.R. McKenzie, P.B. Lukins
• p125 Electronic Structure and Bonding of a-C:H   [ 810 K ]
  Authors: J. Robertson
• p151 The Chemical Vapor Deposition of Diamond   [ 1 M ]
  Authors: W.A. Yarbrough, A. Inspektor, Russell F. Messier
• p175 Deposition of Amorphous Hydrogenated Carbon Films in Low and High Frequency Discharges   [ 746 K ]
  Authors: Y. Catherine
• p197 Preparation and Properties of High Density, Hydrogen Free Hard Carbon Films with Direct Ion Beam or Arc Discharge Deposition   [ 986 K ]
  Authors: J.-P. Hirvonen, J. Koskinen, R. Lappalainen, A. Anttila
• p217 Ion Beam Deposited Diamondlike Carbon Films   [ 567 K ]
  Authors: M.J. Mirtich
• p237 Carbon (sp³) Film Growth from Mass Selected Ion Beams: Parametric Investigations and Subplantation Model   [ 1 M ]
  Authors: Y. Lifshitz, S.R. Kasi, J.W. Rabalais
• p291 Substrate Sputter Erosion Effects during a-C:H Film Formation in a Glow Discharge   [ 367 K ]
  Authors: S. Berg, B. Gelin
• p301 Novel Forms of Carbon from Poly(acrylonitrile): Films and Foams   [ 985 K ]
  Authors: C.L. Renschler, A.P. Sylwester
• p323 Optical Properties and Local Atomic Bonding in Hydrogenated Amorphous Carbon and Silicon-Carbon Alloys   [ 722 K ]
  Authors: F.W. Smith
• p341 Real Time Ellipsometry Characterization and Process Monitoring for Amorphous Carbon Deposition   [ 1 M ]
  Authors: R.W. Collins
• p365 Raman Spectra of Diamondlike Amorphous Carbon Films   [ 748 K ]
  Authors: Masataka Yoshikawa