Paper Title:
Deposition of Amorphous Hydrogenated Carbon Films in Low and High Frequency Discharges
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 52-53)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
175-196
DOI
10.4028/www.scientific.net/MSF.52-53.175
Citation
Y. Catherine, "Deposition of Amorphous Hydrogenated Carbon Films in Low and High Frequency Discharges ", Materials Science Forum, Vols. 52-53, pp. 175-196, 1990
Online since
January 1991
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