Carbon (sp3) Film Growth from Mass Selected Ion Beams: Parametric Investigations and Subplantation Model |
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| Journal | Materials Science Forum (Volumes 52 - 53) |
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| Volume | Properties and Characterization of Amorphous Carbon Films |
| Edited by | J. J. Pouch and S. A. Alterovitz |
| Pages | 237-290 |
| DOI | 10.4028/www.scientific.net/MSF.52-53.237 |
| Citation | Y. Lifshitz et al., 1991, Materials Science Forum, 52-53, 237 |
| Authors | Y. Lifshitz, S.R. Kasi, J.W. Rabalais |
| Full Paper | 
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