Substrate Sputter Erosion Effects during a-C:H Film Formation in a Glow Discharge |
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| Journal | Materials Science Forum (Volumes 52 - 53) |
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| Volume | Properties and Characterization of Amorphous Carbon Films |
| Edited by | J. J. Pouch and S. A. Alterovitz |
| Pages | 291-300 |
| DOI | 10.4028/www.scientific.net/MSF.52-53.291 |
| Authors | S. Berg, B. Gelin |
| Full Paper | 
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