Paper Title:
Substrate Sputter Erosion Effects during a-C:H Film Formation in a Glow Discharge
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 52-53)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
291-300
DOI
10.4028/www.scientific.net/MSF.52-53.291
Citation
S. Berg, B. Gelin, "Substrate Sputter Erosion Effects during a-C:H Film Formation in a Glow Discharge", Materials Science Forum, Vols. 52-53, pp. 291-300, 1990
Online since
January 1991
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Price
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