Paper Title:
Real Time Ellipsometry Characterization and Process Monitoring for Amorphous Carbon Deposition
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 52-53)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
341-364
DOI
10.4028/www.scientific.net/MSF.52-53.341
Citation
R.W. Collins, "Real Time Ellipsometry Characterization and Process Monitoring for Amorphous Carbon Deposition", Materials Science Forum, Vols. 52-53, pp. 341-364, 1990
Online since
January 1991
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Price
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