Real Time Ellipsometry Characterization and Process Monitoring for Amorphous Carbon Deposition |
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| Journal | Materials Science Forum (Volumes 52 - 53) |
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| Volume | Properties and Characterization of Amorphous Carbon Films |
| Edited by | J. J. Pouch and S. A. Alterovitz |
| Pages | 341-364 |
| DOI | 10.4028/www.scientific.net/MSF.52-53.341 |
| Citation | R.W. Collins, 1991, Materials Science Forum, 52-53, 341 |
| Authors | R.W. Collins |
| Full Paper | 
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