Paper Title:
Plasma Deposition, Properties and Structure of Amorphous Hydrogenated Carbon Films
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 52-53)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
41-70
DOI
10.4028/www.scientific.net/MSF.52-53.41
Citation
P. Koidl, C. Wild, B. Dischler, J. Wagner, M. Ramsteiner, "Plasma Deposition, Properties and Structure of Amorphous Hydrogenated Carbon Films", Materials Science Forum, Vols. 52-53, pp. 41-70, 1990
Online since
January 1991
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Price
$32.00
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