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Microbeam Analysis Studies of a-C:H Films

Journal Materials Science Forum (Volumes 52 - 53)
Volume Properties and Characterization of Amorphous Carbon Films
Edited by J. J. Pouch and S. A. Alterovitz
Pages 495-514
DOI 10.4028/www.scientific.net/MSF.52-53.495
Citation A.G. Fitzgerald et al., 1991, Materials Science Forum, 52-53, 495
Authors A.G. Fitzgerald, A.E. Henderson
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