The effects of the third element on the high temperature oxidation of γ'-Ni3Al with 5at%X (X=Ti, Ta, Nb, Cu, Co and Fe) alloys were investigated at 1173K in air, and oxidation behavior could be classified into three groups. The first group, comprised of alloys with Cu and Co, showed good oxidation performance with Al2O3 formation. A second group contains Ti, Ta, and Nb as alloying elements, and showed poor oxidation performance. With Fe or Mn addition the alloy oxidation performance was intermediate between the first and second group. The effects of these elements are discussed associate with partitioning factors for each element in the γ'-phase.