Paper Title:
Off-Angle Dependence of Characteristics of 4H-SiC-Oxide Interfaces
  Abstract

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Periodical
Materials Science Forum (Volumes 527-529)
Edited by
Robert P. Devaty, David J. Larkin and Stephen E. Saddow
Pages
1003-1006
DOI
10.4028/www.scientific.net/MSF.527-529.1003
Citation
Y. Hijikata, H. Yaguchi, S. Yoshida, Y. Takata, K. Kobayashi, H. Nohira, T. Hattori, "Off-Angle Dependence of Characteristics of 4H-SiC-Oxide Interfaces", Materials Science Forum, Vols. 527-529, pp. 1003-1006, 2006
Online since
October 2006
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