Paper Title:
Real Time Observation of SiC Oxidation Using an In Situ Ellipsometer
  Abstract

Real time observation of SiC oxidation was performed using an in-situ ellipsometer over the temperature range from 900°C to 1150°C. The relations between oxide thickness and oxidation time were obtained precisely by virtue of the real time measurements. We analyzed the relations between oxide thickness and oxidation time by applying the Deal and Grove model to obtain the linear and parabolic rate constants. Taking advantage of in-situ measurements, we successfully obtained the oxidation rate constants with high accuracy.

  Info
Periodical
Materials Science Forum (Volumes 527-529)
Edited by
Robert P. Devaty, David J. Larkin and Stephen E. Saddow
Pages
1031-1034
DOI
10.4028/www.scientific.net/MSF.527-529.1031
Citation
K. Kakubari, R. Kuboki, Y. Hijikata, H. Yaguchi, S. Yoshida, "Real Time Observation of SiC Oxidation Using an In Situ Ellipsometer", Materials Science Forum, Vols. 527-529, pp. 1031-1034, 2006
Online since
October 2006
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