Paper Title:
Micromachining of Novel SiC on Si Structures for Device and Sensor Applications
  Abstract

In this paper the multifariousness of SiC/Si heterostructures for device and sensor applications will be demonstrated. 3C-SiC based microelectromechanical resonator beams (MEMS) with different geometries actuated by the magnetomotive effect operating under ambient conditions were fabricated. The resonant frequency reaches values up to 2 MHz. The applications of these resonators are the measurement of the viscosity of liquids or mass detection. Furthermore, photonic devices in the form of SiC/Si infrared gratings for wavelength and polarization filters in infrared spectra are processed. SiC wear protection for a dosing system with the possibility to dose nano- or picoliter droplets of water based liquids as well as SiC nanomasking for catalytic agent nanostructures are demonstrated.

  Info
Periodical
Materials Science Forum (Volumes 527-529)
Edited by
Robert P. Devaty, David J. Larkin and Stephen E. Saddow
Pages
1111-1114
DOI
10.4028/www.scientific.net/MSF.527-529.1111
Citation
C. Förster, V. Cimalla, M. Stubenrauch, C. Rockstuhl, K. Brueckner, M. A. Hein, J. Pezoldt, O. Ambacher, "Micromachining of Novel SiC on Si Structures for Device and Sensor Applications", Materials Science Forum, Vols. 527-529, pp. 1111-1114, 2006
Online since
October 2006
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Price
$32.00
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