Paper Title:
Using Vapour-Liquid-Solid Mechanism for SiC Homoepitaxial Growth on on-axis α-SiC (0001) at Low Temperature
  Abstract

The vapour-Liquid-Solid mechanism was used for growing epitaxial SiC layers on onaxis 6H-SiC and 4H-SiC substrates. By feeding Al70Si30 melts with propane, homoepitaxial growth was demonstrated down to 1100°C on both polytypes. At this temperature, the surface morphology is rough and non uniform with spiral growth forming large hillocks at the places where screw dislocations emerge from the substrate. Raman spectroscopy confirms the absence of the 3C-SiC polytype and shows the high Al doping of the layers. This growth temperature of 1100°C is the lowest one ever reported for growing homoepitaxial layers on low tilt angle SiC substrates. Increasing the temperature to 1200°C eliminates these hillocks but creates other morphological features due to fast substrate etching at this high temperature before growth starts.

  Info
Periodical
Materials Science Forum (Volumes 527-529)
Edited by
Robert P. Devaty, David J. Larkin and Stephen E. Saddow
Pages
271-274
DOI
10.4028/www.scientific.net/MSF.527-529.271
Citation
M. Soueidan, G. Ferro, F. Cauwet, L. Mollet, C. Jacquier, G. Younes, Y. Monteil, "Using Vapour-Liquid-Solid Mechanism for SiC Homoepitaxial Growth on on-axis α-SiC (0001) at Low Temperature", Materials Science Forum, Vols. 527-529, pp. 271-274, 2006
Online since
October 2006
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