Paper Title:
New Aspects in n-type Doping of SiC with Phosphorus
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Periodical
Materials Science Forum (Volumes 527-529)
Edited by
Robert P. Devaty, David J. Larkin and Stephen E. Saddow
Pages
609-612
DOI
10.4028/www.scientific.net/MSF.527-529.609
Citation
E. Rauls, U. Gerstmann, S. Greulich-Weber, K. Semmelroth, G. Pensl, E. E. Haller, "New Aspects in n-type Doping of SiC with Phosphorus", Materials Science Forum, Vols. 527-529, pp. 609-612, 2006
Online since
October 2006
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