Paper Title:
In-Diffusion, Trapping and Out-Diffusion of Deuterium in 4H-SiC Substrates
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Periodical
Materials Science Forum (Volumes 527-529)
Edited by
Robert P. Devaty, David J. Larkin and Stephen E. Saddow
Pages
637-640
DOI
10.4028/www.scientific.net/MSF.527-529.637
Citation
M. K. Linnarsson, M. S. Janson, U. Forsberg, E. Janzén, "In-Diffusion, Trapping and Out-Diffusion of Deuterium in 4H-SiC Substrates", Materials Science Forum, Vols. 527-529, pp. 637-640, 2006
Online since
October 2006
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