Paper Title:
Temperature Induced Phase Transformation on the 4H-SiC(11-20) Surface
  Abstract

The atomic structure of the 4H-SiC(11 2 0) surface including possible phase transformations via Si deposition and annealing has been investigated using low energy electron diffraction (LEED), Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). The sample is initially prepared by hydrogen etching before loading into the ultra-high vacuum system. The sample is then out-gassed to remove oxygen from the surface. To explore the existence of ordered surface phases, Si is deposited on the sample at 850°C for 15 minutes followed by a series of sequential annealing steps. Throughout this process, the surface is monitored by LEED, AES and XPS. LEED shows that the surface continuously maintains a (1×1) periodicity. Yet, two unique and distinguishable (1×1) phases can be identified. The changes between these phases are clearly demonstrated by the LEED spot intensities. Simultaneously, the Auger and XPS data show a decrease in Si intensity.

  Info
Periodical
Materials Science Forum (Volumes 527-529)
Edited by
Robert P. Devaty, David J. Larkin and Stephen E. Saddow
Pages
673-676
DOI
10.4028/www.scientific.net/MSF.527-529.673
Citation
W.Y. Lee, S. Soubatch, U. Starke, "Temperature Induced Phase Transformation on the 4H-SiC(11-20) Surface", Materials Science Forum, Vols. 527-529, pp. 673-676, 2006
Online since
October 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Ulrich Starke, W.Y. Lee, Camilla Coletti, Stephen E. Saddow, Robert P. Devaty, Wolfgang J. Choyke
Abstract:The morphology and atomic structure of 4H-SiC(1102) and 4H-SiC(1102) surfaces, i.e. the surfaces found in the triangular channels of porous...
677
Authors: M. Hetzel, Charíya Virojanadara, Wolfgang J. Choyke, Ulrich Starke
Abstract:Ordered reconstruction phases on the 4H-SiC(1102) surface have been investigated using low-energy electron diffraction (LEED), Auger...
529
Authors: A. Roustila, A. Rabehi, M. Souici, J. Chene
Chapter 6: Surface Engineering
Abstract:ZrNi intermetallic compound is used in several application fields due to its very favorable characteristics for the storage of hydrogen. The...
709
Authors: Oleg Ashkhotov, Irina Ashkhotova
Abstract:Auger electron spectroscopy (AES) and electron energy loss spectroscopy (EELS) studied the interaction of argon ions with a natural oxide...
60
Authors: Konstantin V. Ignatovich, Andrey V. Zotov, Aleksandr A. Saranin
Chapter 1: Atomic Control Surfaces, Semiconductor Nanostructures and their Application
Abstract:We investigated the change of optical second harmonic generation (SHG) intensity during In/Si (111) interface formation. It was proved that...
73