Paper Title:
Low Energy Ion Modification of 3C-SiC Surfaces
  Abstract

The effects of argon and nitrogen bombardment of 3C-SiC surfaces at acceleration voltages below 2 keV were studied by stylus profilometry, reflectometry, reflection high energy electron diffraction and Auger electron spectroscopy (AES). The erosion rate of the SiC surface was determined. It was found that the sputtering rate for argon was three times higher compared to nitrogen. AES measurements revealed argon and nitrogen incorporation at a depth of a few nanometers as well as stoichiometric changes at the same depth scale independent of the acceleration voltage. In the case of the interaction of nitrogen ions with the 3C-SiC surface the formation of a SiCNalloy was detected.

  Info
Periodical
Materials Science Forum (Volumes 527-529)
Edited by
Robert P. Devaty, David J. Larkin and Stephen E. Saddow
Pages
685-688
DOI
10.4028/www.scientific.net/MSF.527-529.685
Citation
C. Förster, R. Kosiba, G. Ecke, V. Cimalla, O. Ambacher, J. Pezoldt, "Low Energy Ion Modification of 3C-SiC Surfaces", Materials Science Forum, Vols. 527-529, pp. 685-688, 2006
Online since
October 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: M. Gao, Sergey P. Tumakha, T. Onishi, Susumu Tsukimoto, Masanori Murakami, Leonard J. Brillson
Abstract:We have used depth-resolved cathodoluminescence and Auger electron spectroscopies, DRCLS and AES, respectively, to probe the electronic...
891
Authors: M. Siad, Samira Abdelli-Messaci, Tahar Kerdja, Slimane Lafane, M. Abdesselam
Abstract:Carbon nitride films were synthesized by pulsed laser ablation of graphite target under nitrogen ambience. The third harmonic of a pulsed...
67
Authors: Yi Liu, Jiang Yong Wang, Siegfried Hofmann, Janez Kovac
Chapter 11: Thin Films/Surface Engineering/Coatings
Abstract:The nitrogen implanted profiles in cobalt films that are generated by N2+ bombardment with three energies of 0.5, 2.0...
1635
Authors: Shao Ping Rao, Yi Liu, Xiao Yin Wang, Wei Jian, Jiang Yong Wang
Chapter 16: Modeling, Analysis and Simulation
Abstract:The nitrogen implanted profile in aluminum generated by 60keV N2+ bombardment is simulated numerically by the Stopping...
1808
Authors: Oleg Ashkhotov, Irina Ashkhotova
Abstract:Auger electron spectroscopy (AES) and electron energy loss spectroscopy (EELS) studied the interaction of argon ions with a natural oxide...
60