Paper Title:
Structural Properties of Titanium-Nickel Films on Silicon Carbide Following High Temperature Annealing
  Abstract

Structural properties of Ni/Ti films deposited on 4H-SiC and annealed at temperatures from 800 to 1040°C have been studied. Films with three different metal deposition sequences were investigated by X-ray diffraction and Auger electron spectroscopy: (A) Ti(100 nm)/Ni(50 nm); (B) Ti(4 nm)/Ni(50 nm)/Ti(100 nm); and (C) Ti(4 nm)/Ni(150 nm). A distinct spatial separation of nickel silicide and titanium carbide layers was observed in all samples. It was discovered that the distribution of the products of the solid state chemical reaction in samples (A) and (B) was independent on the deposition sequence of Ti and Ni layers. The titanium carbide layer located on the interface and covered by the clearly separated nickel silicide layer was detected in both samples after heat treatments.

  Info
Periodical
Materials Science Forum (Volumes 527-529)
Edited by
Robert P. Devaty, David J. Larkin and Stephen E. Saddow
Pages
871-874
DOI
10.4028/www.scientific.net/MSF.527-529.871
Citation
K. Vassilevski, I. P. Nikitina, A. B. Horsfall, N. G. Wright, C. M. Johnson, R. K. Malhan, T. Yamamoto, "Structural Properties of Titanium-Nickel Films on Silicon Carbide Following High Temperature Annealing", Materials Science Forum, Vols. 527-529, pp. 871-874, 2006
Online since
October 2006
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Price
$32.00
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