Silicon Carbide and Related Materials 2005
Materials Science Forum Volumes 527 - 529
doi:10.4028/www.scientific.net/MSF.527-529
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p251
SiC Migration Enhanced Embedded Epitaxial (ME3) Growth Technology
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261 K
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Authors: Yuuichi Takeuchi, Mitsuhiro Kataoka, Tsunenobu Kimoto, Hiroyuki Matsunami, Rajesh Kumar Malhan
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p255
CVD Epitaxial Growth of 4H-SiC on Porous SiC Substrates
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1 M
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Authors: Y. Shishkin, Yue Ke, Fei Yan, Robert P. Devaty, Wolfgang J. Choyke, Stephen E. Saddow
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p259
Studies on Selective Growth and In Situ Etching of 4H-SiC Using a TaC Mask
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661 K
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Authors: Can Hua Li, I. Bhat, T. Paul Chow
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p263
6H-SiC Homoepitaxial Growth and Optical Property of Boron- and Nitrogen-Doped Donor-Acceptor Pair (DAP) Emission of 1º-Off Substrate by Closed-Space Sublimation Method
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204 K
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Authors: Y. Kawai, Tomohiko Maeda, Yoshihiro Nakamura, Yoji Sakurai, Motoaki Iwaya, Satoshi Kamiyama, Hiroshi Amano, Isamu Akasaki, Masahiro Yoshimoto, Tomoaki Furusho, Hiroyuki Kinoshita, Hiromu Shiomi
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p267
Epitaxial Growth of 4H-SiC (0001) by Sublimation Method Using Horizontal Furnace
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310 K
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Authors: Chi Kwon Park, Joon Ho An, Won Jae Lee, Byoung Chul Shin, Shigehiro Nishino
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p271
Using Vapour-Liquid-Solid Mechanism for SiC Homoepitaxial Growth on on-axis α-SiC (0001) at Low Temperature
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975 K
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Authors: Maher Soueidan, Gabriel Ferro, François Cauwet, L. Mollet, Christophe Jacquier, Ghassan Younes, Yves Monteil
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p275
Improvement of 4H-SiC Selective Epitaxial Growth by VLS Mechanism Using Al and Ge Based Melts
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521 K
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Authors: Gabriel Ferro, Maher Soueidan, Christophe Jacquier, Phillippe Godignon, Thomas Stauden, Jörg Pezoldt, Mihai Lazar, Josep Montserrat, Yves Monteil
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p279
Relaxation Mechanism of the Defect-Free 3C-SiC Epitaxial Films Grown on Step-Free 4H SiC Mesas
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2 M
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Authors: H. Du, Marek Skowronski, Philip G. Neudeck, Andrew J. Trunek, David J. Spry, J. Anthony Powell
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p283
Structure Evolution of 3C-SiC on Cubic and Hexagonal Substrates
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838 K
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Authors: Rositza Yakimova, Gholam Reza Yazdi, Nut Sritirawisarn, Mikael Syväjärvi
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p287
Single-Domain 3C-SiC Epitaxially Grown on 6H-SiC by the VLS Mechanism
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2 M
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Authors: Maher Soueidan, Gabriel Ferro, J. Stoemenos, Efstathios K. Polychroniadis, Didier Chaussende, F. Soares, Sandrine Juillaguet, Jean Camassel, Yves Monteil
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p291
‘Switch-Back Epitaxy’ as a Novel Technique for Reducing Stacking Faults in 3C-SiC
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1 M
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Authors: Kuniaki Yagi, Takamitsu Kawahara, Naoki Hatta, Hiroyuki Nagasawa
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p295
Growth Acceleration in FLASiC Assisted Short Time Liquid Phase Epitaxy by Melt Modification
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538 K
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Authors: Jörg Pezoldt, Francisco M. Morales, Thomas Stauden, Christian Förster, Efstathios K. Polychroniadis, J. Stoemenos, D. Panknin, Wolfgang Skorupa
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p299
Hetero-Epitaxial Growth of 3C-SiC on Silicon Substrates by Plasma Assisted CVD
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299 K
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Authors: Hideki Shimizu, Yosuke Aoyama
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p303
Selective Epitaxial Growth of 3C-SiC on Si Using Hexamethyldisilane in a Resistance Heated MOCVD Reactor
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2 M
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Authors: Aparna Gupta, Chacko Jacob
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p307
Growth of 3C-SiC on Si Molds for MEMS Applications
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3 M
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Authors: M. Reyes, M. Waits, S. Harvey, Y. Shishkin, Bruce Geil, J.T. Wolan, Stephen E. Saddow