Paper Title:
Study on the Synthesis Mechanism of Nanocrystalline Diamond Thick Films
  Abstract

Nanocrystalline diamond film is an excellent material for high-tech fields because of its excellent properties. In this paper, research was carried out on the synthesis and deposition mechanism of nanocrystalline diamond thick film in the self-made double bias hot filament chemical vapor (HFCVD) deposited system. Double biases including positive bias on the grid electrode on top of hot filaments and negative bias on the substrate were added to the HFCVD system. During the deposition, nucleation and growth stages were applied alternately to control crystalline size and improve quality. The mechanism of the deposition is discussed in detail in this paper. The positive grid bias increases the active, decomposition and ionization of hydrogen and methane molecules, while negative substrate bias helps positive carbon-containing ions bomb the substrate that leads to the high nucleation density of the diamond. Raman results show that the film prepared has high quality. And SEM results show that the film’s grain size is less than 100nm with thickness of 50μm.

  Info
Periodical
Materials Science Forum (Volumes 532-533)
Edited by
Chengyu Jiang, Geng Liu, Dinghua Zhang and Xipeng Xu
Pages
121-124
DOI
10.4028/www.scientific.net/MSF.532-533.121
Citation
F. Xu, D. W. Zuo, W. Z. Lu, S. L. Song, M. Wang, "Study on the Synthesis Mechanism of Nanocrystalline Diamond Thick Films", Materials Science Forum, Vols. 532-533, pp. 121-124, 2006
Online since
December 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Wei Zuo, Bin Shen, Fang Hong Sun, Ming Chen
Abstract:Three-dimensional finite element simulations were used to investigate the influences of various hot filaments and other deposition...
864
Authors: Duo Sheng Li, Dun Wen Zuo, Yu Li Sun, Rong Fa Chen, Wen Zhuang Lu, Bing Kun Xiang, Min Wang
Abstract:Diamond spherical shell thick film was prepared by high power DC-plasma jet CVD. Atom force microscopy, scanning electron microscopy, Raman...
216
Authors: Rong Fa Chen, Zhao Xia Shen, Liang Gang Dai, Xian Liang Zhang, Rui Zhu, Dun Wen Zuo
Abstract: High quality optical grade thick diamond film wafers with different thickness are prepared by high power DC arc plasma jet CVD (DCPJ CVD)...
245
Authors: Yu Ping Ma, Gen Fu Yuan, M. Chen
Abstract:Ultrafine grain composite diamond films are deposited on the WC-Co-based drills using a bias-enhanced hot filament CVD system. During the...
387
Authors: Xiang Qin Meng, Wu Jun Fu, Bing Wang, Cheng Tao Yang
Chapter 14: Thin Films
Abstract:Nanocrystalline diamond (NCD) films were prepared on polycrystalline aluminum oxide (Al2O3) substrates by microwave plasma chemical vapor...
2419