Paper Title:
MEMS R&D Trends
  Abstract

Micro-Electromechanical Systems (MEMS) has been regarded as one of the most promising technologies for the 21st Century. Recently, some highlight areas attract great attention including Inertial MEMS, Optic MEMS, RF MEMS, BioMEMS, Power MEMS, and NEMS. The state of arts on MEMS research in China is briefly introduced and research activities in Northwestern Polytechnical University such as MEMS CAD tool, inertial MEMS devices, flexible substrate for MEMS integration, micro mirror, micro battery and three dimension measurement are demonstrated.

  Info
Periodical
Materials Science Forum (Volumes 532-533)
Edited by
Chengyu Jiang, Geng Liu, Dinghua Zhang and Xipeng Xu
Pages
181-184
DOI
10.4028/www.scientific.net/MSF.532-533.181
Citation
C. Y. Jiang, Y. He, W. Z. Yuan, "MEMS R&D Trends", Materials Science Forum, Vols. 532-533, pp. 181-184, 2006
Online since
December 2006
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Price
$32.00
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