Paper Title:
Fabrication of Microelectrode by Current Density Control in Electrochemical Micromachining
  Abstract

The fabrication technology of microelectrode in electrochemical micromachining (EMM) was presented. The high frequency short pulses current and current density control between the cathode and anode were synthetically utilized. The mechanism of pulses EMM was expatiated firstly. The shaping principle of microelectrode was analyzed. The current density control strategy was proposed based on the fundamental experimental behavior of electrochemical machining current with the gap variance. Then an experimental setup for EMM is constructed, which has machining process detection and current density control functions, also a pulses power supply and a control computer are involved in. After the technologic experiment analyzed, some microelectrodes with nice surface are fabricated successfully. This method could provide the simple electrode for further electro-machining or micro probe for scanning probe microscopy. Preliminary experimental results show the feasibility of EMM and its potential capability for better machining accuracy and smaller machining size.

  Info
Periodical
Materials Science Forum (Volumes 532-533)
Edited by
Chengyu Jiang, Geng Liu, Dinghua Zhang and Xipeng Xu
Pages
221-224
DOI
10.4028/www.scientific.net/MSF.532-533.221
Citation
B. G. Zhu, Z. L. Wang, "Fabrication of Microelectrode by Current Density Control in Electrochemical Micromachining", Materials Science Forum, Vols. 532-533, pp. 221-224, 2006
Online since
December 2006
Export
Price
$32.00
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