Paper Title:
Deposition and Characterization of Ultra-Smooth Nanocrystalline Diamond Films Using a Graphite-Grid Assisted Hot Filament CVD Method
  Abstract

Nanocrystalline diamond films (NDFs) were deposited on mirror-polished silicon (100) substrates using a graphite-grid assisted hot filament chemical vapor deposition (HFCVD) technique. The evidence of nanocrystallinity, smoothness and purity was obtained by characterizing the sample with various advanced analyses. A graphite-grid was used as the DC electrode, which was pre-coated by diamond films and could emit electron when a negative bias was applied to the under electrode. The results show that the film consists of nanocrystalline diamond grains with sizes of about 7-15nm. The Raman spectroscopy, XRD pattern, HR-TEM image and SAED pattern of the films indicate the presence of nanocrystalline diamond. Surface roughness is measured as Ra<20nm by the profilometry scans. A large quantity of electrons emission from the graphite-grid and positive ions bombardment to the graphite-grid results in an enormous enhancement of the generation of diamond nuclei. Density of a diamond nuclei as high as 1010~1011/cm2 can be attained with this method. NDFs can be deposited on mirror-polished Si substrate surfaces without damaging surface pretreatment for nucleation enhancement. These ultra-smooth films will display excellent performances, which make them the best candidates for semiconductor and MEMS applications.

  Info
Periodical
Materials Science Forum (Volumes 532-533)
Edited by
Chengyu Jiang, Geng Liu, Dinghua Zhang and Xipeng Xu
Pages
249-252
DOI
10.4028/www.scientific.net/MSF.532-533.249
Citation
F. H. Sun, Z. M. Zhang, H. S. Shen, M. Chen, "Deposition and Characterization of Ultra-Smooth Nanocrystalline Diamond Films Using a Graphite-Grid Assisted Hot Filament CVD Method", Materials Science Forum, Vols. 532-533, pp. 249-252, 2006
Online since
December 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Duo Sheng Li, Dun Wen Zuo, Yu Li Sun, Rong Fa Chen, Wen Zhuang Lu, Bing Kun Xiang, Min Wang
Abstract:Diamond spherical shell thick film was prepared by high power DC-plasma jet CVD. Atom force microscopy, scanning electron microscopy, Raman...
216
Authors: Yu Ping Ma, Gen Fu Yuan, M. Chen
Abstract:Ultrafine grain composite diamond films are deposited on the WC-Co-based drills using a bias-enhanced hot filament CVD system. During the...
387
Authors: Xiang Qin Meng, Wu Jun Fu, Bing Wang, Cheng Tao Yang
Chapter 14: Thin Films
Abstract:Nanocrystalline diamond (NCD) films were prepared on polycrystalline aluminum oxide (Al2O3) substrates by microwave plasma chemical vapor...
2419
Authors: Yan Feng Liu, Long Cheng Yin, Li Xin Zhao, You Jin Zheng
Chapter 1: Thin Films
Abstract:The DC plasma chemical vapor deposition (DC-PCVD) method was a promising technique to fabricate CVD diamond coatings in industry, because it...
7
Authors: You Yi Zheng, Chun Lin Zhang, Xing Xin Xu
Chapter 3: Materials Science
Abstract:The diamond thin films was deposited by hot filament CVD method in the Cemented Carbide (YG6) substrate. The surface morphology and quality...
589