Experimental Study of Micro-Flowing Characteristics of Liquid Transport
in Round Micro-Channels
|
| Journal |
Materials Science Forum (Volumes 532 - 533) |
| Volume |
Advances in Materials Manufacturing Science and Technology II |
| Edited by |
Chengyu Jiang, Geng Liu, Dinghua Zhang and Xipeng Xu |
| Pages |
29-32 |
| DOI |
10.4028/www.scientific.net/MSF.532-533.29 |
| Online since |
December, 2006 |
| Authors |
Zhi Yong Ling,
Ji Chang Yang,
Jian Ning Ding,
Yong Liu,
Zhi Wen Zhuang,
Zhen Fan,
Ping Yang
|
| Keywords |
Distilled Water, Flowing Characteristic, Micro Channel, Silicon Oil |
| Abstract |
Micro-flowing technique gained popular applications in microdevices of microelectromechanical
systems (MEMS), and the performance of micro-devices is greatly determined by the
properties of micro-flow. This paper studied the characteristics of different viscosity fluid flowing
over microchannels with different diameters and lengths under low pressure driving, and the
influence of scale effects on the flowing characteristics of low viscosity fluids was also examined.
The experiments studied the flow rate–pressure characteristics of distilled water flowing over
microchannels with diameter of 13 μm, 20 μm, and silicon oil flowing over microchannels with
diameters of 50 μm, 100 μm. The results indicate that, when the diameter of micro-channel is more
than 20 μm, the flowing characteristics of distilled water and silicon oil agrees well with conventional
flow theory, and when the diameter of microchannels is 13μm, the flowing characteristics are related
to the length of micro-channel. When the length is relatively shorter, the flowing characteristics are
almost in agreement with the conventional flow theory. When the length reaches 100 mm, the flow
rate is much higher than the values predicted by theoretical calculation when the length reaches 100
mm. It is obvious that scale effect arises when the length arrives to 100 mm and the velocity slippage
results in the great increase of flow rate. |
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