Paper Title:
Fabrication of Patterned Metal Films on Organic Substrates by Transfer Printing
  Abstract

Here a simple and direct method based on transfer printing has beep developed, in which rigid stamps transfer metal films deposited on the relief surface of the stamps onto patterned organic substrates. Ultra-precision machining technology is combined with conventional photolithography to fabricate patterned Si stamps and organic substrates by replica molding. Experiment results indicate that patterned metal films on Silicon stamps were successfully transferred onto PDMS substrates. Fabrication of patterned metal films on organic substrates by transfer printing may suit for fabricating sub-micrometer and nanometer scale features in a single process.

  Info
Periodical
Materials Science Forum (Volumes 532-533)
Edited by
Chengyu Jiang, Geng Liu, Dinghua Zhang and Xipeng Xu
Pages
524-527
DOI
10.4028/www.scientific.net/MSF.532-533.524
Citation
S. Dong, X. L. Zhao, J. H. Wang, Z. Q. Li, T. Sun, Y. C. Liang, "Fabrication of Patterned Metal Films on Organic Substrates by Transfer Printing", Materials Science Forum, Vols. 532-533, pp. 524-527, 2006
Online since
December 2006
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Price
$32.00
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