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Fabrication of Patterned Metal Films on Organic Substrates by Transfer Printing

Journal Materials Science Forum (Volumes 532 - 533)
Volume Advances in Materials Manufacturing Science and Technology II
Edited by Chengyu Jiang, Geng Liu, Dinghua Zhang and Xipeng Xu
Pages 524-527
DOI 10.4028/www.scientific.net/MSF.532-533.524
Citation Shen Dong et al., 2006, Materials Science Forum, 532-533, 524
Online since December, 2006
Authors Shen Dong, Xiao Li Zhao, Jing He Wang, Zheng Qiang Li, Tao Sun, Ying Chun Liang
Keywords PDMS (Polydimethylsiloxane), Photolithography, Stamp, Transfer Printing, Ultra-Precision Machining
Abstract

Here a simple and direct method based on transfer printing has beep developed, in which rigid stamps transfer metal films deposited on the relief surface of the stamps onto patterned organic substrates. Ultra-precision machining technology is combined with conventional photolithography to fabricate patterned Si stamps and organic substrates by replica molding. Experiment results indicate that patterned metal films on Silicon stamps were successfully transferred onto PDMS substrates. Fabrication of patterned metal films on organic substrates by transfer printing may suit for fabricating sub-micrometer and nanometer scale features in a single process.

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