Temperature and Humidity Effects on Micro/Nano Handling |
| Journal |
Materials Science Forum (Volumes 532 - 533) |
| Volume |
Advances in Materials Manufacturing Science and Technology II |
| Edited by |
Chengyu Jiang, Geng Liu, Dinghua Zhang and Xipeng Xu |
| Pages |
681-684 |
| DOI |
10.4028/www.scientific.net/MSF.532-533.681 |
| Online since |
December, 2006 |
| Authors |
Quan Zhou, Bo Chang, Heikki N. Koivo |
| Keywords |
Environment Effects, Humidity, Micro/Nano Handling, Micromechatronics, Temperature |
| Abstract |
Micro/nano handling is an important enabling technology for future manufacturing. In the
micro scale, adhesion is a severe problem for efficient and accurate handling tasks. The cause of the
adhesion is largely from the microforces, namely van der Waals, electrostatic and capillary forces.
Those forces, however, are functions of ambient environmental conditions. This paper exams two
important ambient environment parameters in normal micro/nano handling environment: temperature
and humidity, in both theoretical analysis and experimental studies. A short guideline for
microhandling with temperature and humidity consideration is suggested based on the studies. |
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