Paper Title:

An Investigation of Form Compensation in Fabricating Microlens Arrays by Ultra-Precision Fast-Tool-Servo Technology

Periodical Materials Science Forum (Volumes 532 - 533)
Main Theme Advances in Materials Manufacturing Science and Technology II
Edited by Chengyu Jiang, Geng Liu, Dinghua Zhang and Xipeng Xu
Pages 689-692
DOI 10.4028/www.scientific.net/MSF.532-533.689
Citation Tsz Chun Kwok et al., 2006, Materials Science Forum, 532-533, 689
Online since December, 2006
Authors Tsz Chun Kwok, Suet To, Chi Fai Cheung, Su Juan Wang, Wing Bun Lee
Keywords Fast Tool Servo (FTS), Form Accuracy, Microlens Arrays, Optimal Cutting Conditions, Surface Roughness (SR), Tool Compensation, Ultra-Precision Machining
Price US$ 28,-
Article Preview
View full size
Abstract

Microlens arrays are widely used as critical components in a large number of photonics and telecommunication products. The increasing demand for high-tech products provides an expanding room for the development of the micro-fabrication technology. This study presents a tool compensation for correcting the form error of fabricated microlenses in ultra-precision machining with fast-tool-servo (FTS) system. After presentation of optimal cutting conditions deduced on the basis of cutting experiments of microlens arrays, a tool radius compensation method will be proposed and evaluated in this paper. This methodology makes use of form measurement data from a Form Talysurf system to modify the C program employed in the software of ultra-precision machining FTS system – SOP. The form error was successfully reduced after implementation of tool compensation.