An Investigation of Form Compensation in Fabricating Microlens Arrays by Ultra-Precision Fast-Tool-Servo Technology
| Periodical | Materials Science Forum (Volumes 532 - 533) |
|---|---|
| Main Theme | Advances in Materials Manufacturing Science and Technology II |
| Edited by | Chengyu Jiang, Geng Liu, Dinghua Zhang and Xipeng Xu |
| Pages | 689-692 |
| DOI | 10.4028/www.scientific.net/MSF.532-533.689 |
| Citation | Tsz Chun Kwok et al., 2006, Materials Science Forum, 532-533, 689 |
| Online since | December, 2006 |
| Authors | Tsz Chun Kwok, Suet To, Chi Fai Cheung, Su Juan Wang, Wing Bun Lee |
| Keywords | Fast Tool Servo (FTS), Form Accuracy, Microlens Arrays, Optimal Cutting Conditions, Surface Roughness (SR), Tool Compensation, Ultra-Precision Machining |
| Price | US$ 28,- |
Microlens arrays are widely used as critical components in a large number of photonics and telecommunication products. The increasing demand for high-tech products provides an expanding room for the development of the micro-fabrication technology. This study presents a tool compensation for correcting the form error of fabricated microlenses in ultra-precision machining with fast-tool-servo (FTS) system. After presentation of optimal cutting conditions deduced on the basis of cutting experiments of microlens arrays, a tool radius compensation method will be proposed and evaluated in this paper. This methodology makes use of form measurement data from a Form Talysurf system to modify the C program employed in the software of ultra-precision machining FTS system – SOP. The form error was successfully reduced after implementation of tool compensation.