Polycrystalline diamond layers are mostly used in various fields of industrial application. Mechanical tension is generated due to the different heat expansion coefficients of the substrate and the layer, which leads to fracturing in some cases. In this work a homogeneous polycrystalline diamond structure has been deposited on Si/SiO2 substrate by microwave assisted CVD method (MW-PECVD). An selective etching technique has been used to remove the silicon below the 2.5 micron thick diamond layer. A self-supporting diamond structure has been created this way. Polycrystalline diamond based heaters and thermometers can be made from doped diamond materials, which can resist corrosive and radiative environment.