Paper Title:
Superplastic Nanoforging of Pt-Based Metallic Glass with Dies of Zr-BMG and Glassy Carbon Fabricated by Focused Ion Beam
  Abstract

This paper introduces a technique for fabricating nano-structures through super plastic nano-forging of metallic glass using nano-scale dies that are fabricated by a focused-ion beam (FIB). FIB-machining characteristics of glassy carbon and Zr-based metallic glass have been studied and are useful for fabricating nano-scale dies because of the isotropic homogeneity of their amorphous structures. We used the dies to nano-forge Pt48.75Pd9.75Cu19.5P22 metallic glass. The thin foil specimens were heated in a small furnace and compressively loaded in a small vacuum chamber. Dies, a die-forged 1μm-diameter micro-gear, and both 800 and 400nm periodic nano-structures for optical applications were demonstrated. We observed the effects of thermal expansion and contact angle between the working material and the die materials on nano-formability. Metallic glasses are highly useful as materials for nano-imprinting and as die materials for FIB nano-machining.

  Info
Periodical
Materials Science Forum (Volumes 539-543)
Main Theme
Edited by
T. Chandra, K. Tsuzaki, M. Militzer , C. Ravindran
Pages
2088-2093
DOI
10.4028/www.scientific.net/MSF.539-543.2088
Citation
Y. Saotome, S. Okaniwa, H. Kimura, A. Inoue, "Superplastic Nanoforging of Pt-Based Metallic Glass with Dies of Zr-BMG and Glassy Carbon Fabricated by Focused Ion Beam", Materials Science Forum, Vols. 539-543, pp. 2088-2093, 2007
Online since
March 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Harini Sosiati, Satoshi Hata, Toshiya Doi
Chapter 1: Sensors and Instrumentation
Abstract:A focused ion beam (FIB) mill equipped with a microsampling (MS) unit and combined with transmission electron microscopy (TEM)/scanning...
108
Authors: Peter Ižol, Jozef Beňo
Chapter 4: Technological Properties of Materials for Mechanical Engineering
Abstract:Forming dies are often costly for producers and the cost amount is influenced by production process too. If the die is manufactured by...
268