Calcium phosphate films were coated on commercially pure titanium substrates by radiofrequency magnetron sputtering using β-tricalcium phosphate targets. The films consisted of amorphous calcium phosphate and oxyapatite phases. Immersion tests of the films were carried out in Hanks’ solution and PBS(-), and apatite formation and calcium ion elution from the films were investigated. The titanium cylinders coated with calcium phosphate films were implanted into the mandibles of beagle dogs. These results suggest that coating with calcium phosphate improves the biocompatibility of titanium implants with bone tissue.