Paper Title:
Sputter Deposited Boron Nitride: A Review
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 54-55)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
1-20
DOI
10.4028/www.scientific.net/MSF.54-55.1
Citation
C. R. Aita, "Sputter Deposited Boron Nitride: A Review", Materials Science Forum, Vols. 54-55, pp. 1-20, 1990
Online since
January 1991
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Price
$32.00
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