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Sputter Deposited Boron Nitride: A Review

Journal Materials Science Forum (Volumes 54 - 55)
Volume Synthesis and Properties of Boron Nitride
Edited by J. J. Pouch and S. A. Alterovitz
Pages 1-20
DOI 10.4028/www.scientific.net/MSF.54-55.1
Citation Carolyn Rubin Aita, 1991, Materials Science Forum, 54-55, 1
Authors Carolyn Rubin Aita
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