Paper Title:
Preparation of Boron Nitride Thin Films by Chemical Vapor Deposition
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 54-55)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
111-140
DOI
10.4028/www.scientific.net/MSF.54-55.111
Citation
K. Nakamura, "Preparation of Boron Nitride Thin Films by Chemical Vapor Deposition", Materials Science Forum, Vols. 54-55, pp. 111-140, 1990
Online since
January 1991
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Price
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