Preparation of Boron Nitride Thin Films by Chemical Vapor Deposition |
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| Journal | Materials Science Forum (Volumes 54 - 55) |
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| Volume | Synthesis and Properties of Boron Nitride |
| Edited by | J. J. Pouch and S. A. Alterovitz |
| Pages | 111-140 |
| DOI | 10.4028/www.scientific.net/MSF.54-55.111 |
| Citation | K. Nakamura, 1991, Materials Science Forum, 54-55, 111 |
| Authors | K. Nakamura |
| Full Paper | 
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