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Thin Boron Nitride Films Obtained by Physical Vapour Deposition and by Ion Beam Assisted Techniques

Journal Materials Science Forum (Volumes 54 - 55)
Volume Synthesis and Properties of Boron Nitride
Edited by J. J. Pouch and S. A. Alterovitz
Pages 21-44
DOI 10.4028/www.scientific.net/MSF.54-55.21
Authors L. Guzman, M. Elena
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