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The Properties of Low Pressure Chemical Vapor Deposited Boron Nitride Thin Films

Journal Materials Science Forum (Volumes 54 - 55)
Volume Synthesis and Properties of Boron Nitride
Edited by J. J. Pouch and S. A. Alterovitz
Pages 229-260
DOI 10.4028/www.scientific.net/MSF.54-55.229
Citation S.S. Dana, 1991, Materials Science Forum, 54-55, 229
Authors S.S. Dana
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