Paper Title:
Characterization of BN Thin Films Deposited by Plasma CVD
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 54-55)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
277-294
DOI
10.4028/www.scientific.net/MSF.54-55.277
Citation
Y. Osaka, A. Chayahara, H. Yokoyama, M. Okamoto, T. Hamada, T. Imura, M. Fujisawa, "Characterization of BN Thin Films Deposited by Plasma CVD", Materials Science Forum, Vols. 54-55, pp. 277-294, 1990
Online since
January 1991
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Price
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