Characterization of BN Thin Films Deposited by Plasma CVD |
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| Journal | Materials Science Forum (Volumes 54 - 55) |
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| Volume | Synthesis and Properties of Boron Nitride |
| Edited by | J. J. Pouch and S. A. Alterovitz |
| Pages | 277-294 |
| DOI | 10.4028/www.scientific.net/MSF.54-55.277 |
| Citation | Y. Osaka et al., 1991, Materials Science Forum, 54-55, 277 |
| Authors | Y. Osaka, Akiyoshi Chayahara, Haruki Yokoyama, M. Okamoto, Toru Hamada, Toru Imura, M. Fujisawa |
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