Paper Title:
Thin Film Boron Nitride for Semiconductor Application
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 54-55)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
329-352
DOI
10.4028/www.scientific.net/MSF.54-55.329
Citation
E. Yamaguchi, "Thin Film Boron Nitride for Semiconductor Application", Materials Science Forum, Vols. 54-55, pp. 329-352, 1990
Online since
January 1991
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Price
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