The surface oxidation behavior was investigated over a range of solid state bonding condition of the Ti-6Al-4V ELI alloy. Since the oxides at the bonding interface may prevent the materials from complete bonding, it is important to understand the oxidation behavior at solid state bonding condition. The activation energy of oxidation of Ti-6Al-4V ELI is estimated to be 318 KJ/mol in an environment of solid state bonding process. For Ti-6Al-4V ELI alloy, strucutral integrity of bonding interface without oxides have been obtained at 850°C applying pressure of 3MPa for 1 hour. Solid state diffusion bonding of Ti-15V-3Cr-3Sn-3Al alloy was also obtained under a pressure of 6MPa for 3 hours at 925°C.