Paper Title:
Characterization and Fabrication of Nano-Sized Patterns and Microfluidic Channels Derived from Polyvinylsilazane via Soft Lithographic Technique
  Abstract

Interests on the fabrication of microfluidic devices have increased in the fields of micro total analysis system (μ-TAS) and MEMS (Microelectromechanical systems) due to their chemical inertness and high thermal stability. The thermal characterization of the SiCN preceramic polymer, polyvinylsilazane, showed that the cured polymer has ceramic properties at heat treatment temperature of 600 oC or above. In the characterization of the mechanical properties, the characteristic values of the elastic modulus and hardness notably increased for the heat-treated SiCN. The present study describes the preparation of nano-sized patterns and microfluidic channels using a soft lithographic technique. The study shows that the fabrication of microchannels using the cured inorganic polymers holds tremendous potential in the field of microfluidics, where materials with high optical transparency, thermal stability and chemical inertness are in demand as niche between conventional microfluidics using glass and polymeric materials.

  Info
Periodical
Materials Science Forum (Volumes 544-545)
Edited by
Hyungsun Kim, Junichi Hojo and Soo Wohn Lee
Pages
677-680
DOI
10.4028/www.scientific.net/MSF.544-545.677
Citation
H. J. Lee, J. H. Park, P. Jayakumar, T. H. Yoon, L. Y. Hong, S. H. Park, D. P. Kim, "Characterization and Fabrication of Nano-Sized Patterns and Microfluidic Channels Derived from Polyvinylsilazane via Soft Lithographic Technique", Materials Science Forum, Vols. 544-545, pp. 677-680, 2007
Online since
May 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Tijjani Adam, U. Hashim, T.S. Dhahi
Abstract:At a macro scale level, mixing is generally achieved by a turbulent flow, which makes possible of segregating the fluid in small domains,...
345