Interests on the fabrication of microfluidic devices have increased in the fields of micro total analysis system (μ-TAS) and MEMS (Microelectromechanical systems) due to their chemical inertness and high thermal stability. The thermal characterization of the SiCN preceramic polymer, polyvinylsilazane, showed that the cured polymer has ceramic properties at heat treatment temperature of 600 oC or above. In the characterization of the mechanical properties, the characteristic values of the elastic modulus and hardness notably increased for the heat-treated SiCN. The present study describes the preparation of nano-sized patterns and microfluidic channels using a soft lithographic technique. The study shows that the fabrication of microchannels using the cured inorganic polymers holds tremendous potential in the field of microfluidics, where materials with high optical transparency, thermal stability and chemical inertness are in demand as niche between conventional microfluidics using glass and polymeric materials.