Paper Title:
Stability Enhancement for Cold Field Emitter for Reliable Operation of the Micro-Column System
  Abstract

Recently, the micro-column has been intensively studied as a potential candidate for next-generation lithography with high-throughput capability. The micro-column has a simple structure with an electron emitter, micro-lenses, a double octupole deflector, and an Einzel lens. The structure and performance of the micro-column are dependent on the characteristics of the electron emitter. The electron emitter should have several prerequisites such as stable emission of electrons, high brightness and long lifetime. It is also necessary for the emitted electrons to have sufficiently low kinetic energy, which can be achieved by using a very sharp emission tip. In this work, we made an extremely sharp tip by electro-chemically etching the tungsten wire in 10 % KOH solution. From the Fowler-Nordheim plot, the effective radius of the tip was found to be as small as ~12 nm, which is consistent with the value measured by SEM. We also discovered that the stability of emission can be enhanced very much through thermal treatment of the tip end by irradiating the Nd:YAG laser pulse

  Info
Periodical
Materials Science Forum (Volumes 544-545)
Edited by
Hyungsun Kim, Junichi Hojo and Soo Wohn Lee
Pages
829-832
DOI
10.4028/www.scientific.net/MSF.544-545.829
Citation
J.H. Kim, S. J. Ahn, C. G. Park, H. S. Kim, D. W. Kim, S. J. Ahn, "Stability Enhancement for Cold Field Emitter for Reliable Operation of the Micro-Column System", Materials Science Forum, Vols. 544-545, pp. 829-832, 2007
Online since
May 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Wei Liu, Jin Shu Wang, Fei Gao, Na Li, Hong Yi Li, Mei Ling Zhou, Tie Yong Zuo
Abstract:A systematic investigation of the fabrication process, microstructure and treatment technology of the Rare earth oxide doped Mo cermet...
845
Authors: Zhi Gang Wang, Ke Gao Liu, Min Jing, Bo Pang
Abstract:The surface morphology of the non-conducting granular materials was analysis by SEM under low vacuum conditions. The effects of the incident...
897
Authors: Akifumi Koike, Yasuo Takagi, Takahiro Fujino, Toru Aoki, Y. Neo, Hidenori Mimura, Tomoya Yoshida, Masayoshi Nagao, Kentaro Sakai, Hidekazu Murata
Abstract:A crossover point was observed with a fabricated quintuple-gated micro-column by an enhanced knife-edge measurement. Developing this result,...
94
Authors: Gang Chen, Hui Zhong Ma, Lan Zhang, Hong Ye Chen, Qiue Xia, Ning Yao, Bing Lin Zhang
Chapter 1: Nanotechnology and Nanomaterials
Abstract:Three kinds of different diameter carbon nanotubes (CNTS) films deposited on aluminum sheets by electrophoretic deposition method. Scanning...
47
Authors: Jin Hai Gao, Wu Qing Zhang, Zhen Li
Chapter 2: Material Science and Materials Processing
Abstract:The diamond microcrystalline-aggregate array was fabricated by microwave plasma chemical vapor deposition (MPCVD) method. The ceramic with a...
596