Silicon Carbide and Related Materials 2006
Materials Science Forum Volumes 556 - 557
doi:10.4028/www.scientific.net/MSF.556-557
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p3
Quality Aspects for the Production of SiC Bulk Crystals
[
549 K
]
Authors: Thomas L. Straubinger, Michael Rasp, Erwin Schmitt, Arnd Dietrich Weber
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p9
An Inserted Epitaxial Layer for SiC Single Crystal Growth by the Physical Vapor Transport Method
[
4 M
]
Authors: Jung Doo Seo, Joon Ho An, Jung Gon Kim, Jung Kyu Kim, Myung Ok Kyun, Won Jae Lee, Il Soo Kim, Byoung Chul Shin, Kap Ryeol Ku
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p13
Growth and Characterization of 13C Enriched 4H-SiC for Fundamental Materials Studies
[
176 K
]
Authors: Yeon Suk Jang, Sakwe Aloysius Sakwe, Peter J. Wellmann, Sandrine Juillaguet, Hervé Peyre, Jean Camassel, John W. Steeds
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p17
Growth and Characterization of High-Quality 6H-SiC (0115) Bulk Crystals
[
1 M
]
Authors: Octavian Filip, Boris M. Epelbaum, Matthias Bickermann, Albrecht Winnacker
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p21
Growth Induced Stacking Fault Formation in 4H-SiC
[
852 K
]
Authors: D. Siche, M. Albrecht, H. J. Rost, Andreas Sendzik
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p25
Hydrogen Effect on SiC Single Crystal Prepared by the Physical Vapor Transport Method
[
3 M
]
Authors: Jung Gon Kim, Joon Ho An, Jung Doo Seo, Jung Kyu Kim, Myung Ok Kyun, Won Jae Lee, Il Soo Kim, Byoung Chul Shin, Kap Ryeol Ku
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p29
Effect of Growth Conditions on Cubic Silicon Carbide Crystals Grown from Silicon Solution
[
211 K
]
Authors: Jessica Eid, Jean Louis Santailler, Bernard Ferrand, Guy Rolland, Michel Burdin, R. Lewandowska, Jean Camassel
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p35
Growth and Electrical Characterization of 4H-SiC Epilayers
[
323 K
]
Authors: Tsunenobu Kimoto, Katsunori Danno, T. Hori, Hiroyuki Matsunami
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p41
Growth of SiC from a Liquid Phase at Low Temperature
[
1 M
]
Authors: Gabriel Ferro, Maher Soueidan, Olivier Kim-Hak, François Cauwet, Yves Monteil
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p47
Thick Epilayer for Power Devices
[
2 M
]
Authors: Anne Henry, Jawad Hassan, Henrik Pedersen, Franziska Christine Beyer, J. Peder Bergman, S. Andersson, Erik Janzén, Phillippe Godignon
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p53
4H-SiC Epitaxial Layers Grown on On-Axis Si-Face Substrate
[
272 K
]
Authors: Jawad Hassan, J. Peder Bergman, Anne Henry, Henrik Pedersen, Patrick J. McNally, Erik Janzén
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p57
A Designed Experiment Approach to Improvement and Understanding of the SiC Epitaxial Growth Process
[
280 K
]
Authors: James D. Oliver, Brian H. Ponczak
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p61
Analysis of SiC CVD Growth in a Horizontal Hot-Wall Reactor by Experiment and 3D Modelling
[
551 K
]
Authors: Y. Shishkin, Rachael L. Myers-Ward, Stephen E. Saddow, Alexander Galyukov, A.N. Vorob'ev, D. Brovin, D. Bazarevskiy, R.A. Talalaev, Yuri N. Makarov
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p65
Boron Doping during Vapor-Liquid-Solid Growth of Homoepitaxial 4H-SiC Layers
[
1 M
]
Authors: Maher Soueidan, Gabriel Ferro, B. Nsouli, Nada Habka, Veronique Soulière, Ghassan Younes, K. Zahraman, Jean Marie Bluet, Yves Monteil
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p69
Comparison of Chlorine Based In Situ Etching of 4H SiC Substrates
[
3 M
]
Authors: Mike F. MacMillan, Mark J. Loboda, Jian Wei Wan, Gil Yong Chung, E.P. Carlson, Michael J. Spaulding, D. Deese