Paper Title:
Trends in Commercially Available SiC Substrates
  Abstract

Device quality SiC wafers are extremely expensive and available from only a limited number of vendors. This has limited the ability of researchers to compare and evaluate quality from various vendors. This paper surveys some properties and characteristics of SiC wafers purchased in the commercial market place and describes the product variability among vendors as a method to highlight the areas where improvements in substrate quality are desirable.

  Info
Periodical
Materials Science Forum (Volumes 556-557)
Edited by
N. Wright, C.M. Johnson, K. Vassilevski, I. Nikitina and A. Horsfall
Pages
291-294
DOI
10.4028/www.scientific.net/MSF.556-557.291
Citation
J. D. Oliver , "Trends in Commercially Available SiC Substrates", Materials Science Forum, Vols. 556-557, pp. 291-294, 2007
Online since
September 2007
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Price
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