Paper Title:
Nano-Columnar Pore Formation in the Photo-Electrochemical Etching of n-Type 6H SiC
  Abstract

We have fabricated columnar nano-porous SiC by photo-electrochemical etching on the C-face of n-type 6H SiC at constant voltage. SEM images reveal that the pores are long, straight and parallel with diameters of about 20 nm. We have produced such layers up to 250 μm thick. The pore morphologies for both Si and C-face SiC samples are compared and discussed as a part of the effort to understand the growth mechanism. It is found that the constant voltage etching condition on C-face SiC is crucial for this nano-columnar pore formation.

  Info
Periodical
Materials Science Forum (Volumes 556-557)
Edited by
N. Wright, C.M. Johnson, K. Vassilevski, I. Nikitina and A. Horsfall
Pages
741-744
DOI
10.4028/www.scientific.net/MSF.556-557.741
Citation
Y. Ke, R. P. Devaty, W. J. Choyke, "Nano-Columnar Pore Formation in the Photo-Electrochemical Etching of n-Type 6H SiC ", Materials Science Forum, Vols. 556-557, pp. 741-744, 2007
Online since
September 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Norimasa Tsuji, Masataka Yoshikawa, Tadao Toda, Hiroko Machida, Hajime Ohgushi
Abstract:The purpose of this study was to estimate hard tissue formation in two types of porous columnar hydroxyapatite (HA) in order to use as a...
961
Authors: Byung Koog Jang, Norio Yamaguchi, Hideaki Matsubara
Abstract:ZrO2-4mol% Y2O3 coatings on zirconia substrate were deposited by EB-PVD. Influence of the coating thickness on thermal conductivity and...
509
Authors: A. Bastos, Stefan Zaefferer, Dierk Raabe
Abstract:A Co-20at%Ni polycrystal produced by electrodeposition was studied in its detail using orientation microscopy. By analyzing the local...
953
Authors: Yi Qi Wang, W.K. Joo, Chae Sil Kim, Jung I. Song
Abstract:High-temperature oxidation resistance of 7 wt.%Y2O3-ZrO2 thermal barrier coatings (TBCs) irradiated by high-intensity pulsed ion beam...
1337
Authors: M.B. Bhatty, Fazal Ahmad Khalid, Aamer Nusair Khan
Abstract:Thermal barrier coatings (TBCs) are multilayered coatings having the complex structure. In thermal spray coatings characteristic features of...
364