Paper Title
Authors: Morten Kildemo, Ulrike Grossner, Bengt G. Svensson, S. Raaen
Abstract:The deposition and annealing in ultra high vacuum (UHV) of 5-6 monolayers (ML) of cerium on clean reconstructed Si-face 4H-SiC (0001) is...
Authors: Thomas Frank, Svetlana Beljakowa, Gerhard Pensl, Tsunenobu Kimoto, Valeri V. Afanas'ev
Abstract:In n-type 4H-SiC, over-oxidation of an implanted surface-near, Gaussian nitrogen-profile results in MOS capacitors, which possess a...
Authors: Roberta Nipoti
Abstract:With the aim to set a starting point for future investigations on the relevance of the heating ramp on the annealing of ion implanted SiC, a...
Authors: Y. Wang, Peter A. Losee, S. Balachandran, I. Bhat, T. Paul Chow, Y. Wang, B.J. Skromme, J.K. Kim, E.F. Schubert
Abstract:Low resistance p-layers are achieved in this paper using a graphite cap to protect SiC surface from out-diffusion of Si during high...
Authors: Mariaconcetta Canino, Filippo Giannazzo, Fabrizio Roccaforte, Antonella Poggi, Sandro Solmi, Vito Raineri, Roberta Nipoti
Abstract:The surface morphology and the electrical activation of P+ implanted 4H-SiC were investigated with respect to annealing treatments that...
Authors: Kenneth A. Jones, M.C. Wood, T.S. Zheleva, K.W. Kirchner, Michael A. Derenge, A. Bolonikov, Tangali S. Sudarshan, R.D. Vispute, Shiva S. Hullavarad, S. Dhar
Abstract:4H-SiC samples implanted with 1020 Al were annealed at various temperatures with a BN/AlN or graphite cap, and there morphological,...
Authors: Etsushi Taguchi, Yu Suzuki, Masataka Satoh
Abstract:The electrical properties of N ion implanted 3C-SiC(100) have been investigated by means of Hall effect measurement. The p-type epitaxial...
Authors: Shingo Miyagawa, Tomoyuki Suzuki, Takahiro Kudo, Masataka Satoh
Abstract:The encapsulating annealing of N+ implanted 4H-SiC(0001) is performed using diamondlike- carbon (DLC) films for the suppression of surface...
Authors: Martin Rambach, Anton J. Bauer, Heiner Ryssel
Abstract:The influence of the implantation temperature on the surface roughness and the resistivity of aluminum implanted 4H-silicon carbide was...
Showing 131 to 140 of 248 Paper Titles